Masao Tokumura

1 works

Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Japan 567

1. ESCA compositional profiles and electrical properties of diamond‐like carbon film/Si MIS structure

   Yusuke Mizokawa, Osamu Komoda, Tatsuro Miyasato +3

   ArticleDiamond and Carbon-based Materials ResearchElectronics and Communications in Japan (Part II Electronics)19870 citations

   ABIABI:AkademIndex/openalex/1987.article.000104