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Chapter

Ion-Molecular Epitaxy

A. LyutovichElectronics Institute, Academy of Sciences of the Uzbek SSR, Tashkent, Uzbekistan
1987en
ABI

Abstract

No abstract available.

Topics

Semiconductor materials and devicesIntegrated Circuits and Semiconductor Failure AnalysisIon-surface interactions and analysis

Identifiers

DOI
10.1007/978-1-4615-7122-3_4

Citations and references

Cited by 011 references
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