ArticleVanadium diffusion in siliconG.K. Azimov·S.Z. Zajnabidinov·Yu. I. KozlovTashkentskij Gosudarstvennyj Univ., Tashkent (USSR)·1989·enABIABI:AkademIndex/openalex/1989.article.000149CiteAbstractNo abstract available.TopicsAdvanced Materials Characterization TechniquesSemiconductor materials and interfacesSemiconductor materials and devicesCitations and referencesCited by 00 referencesMetrics — AkademScholar