Article

Production of thin metallic and dielectric coatings by a plasma technique and their investigation

P.M. RasulovArifov Institute of Electronica, Academgorodok, 700143 Tashkent U.S.S.RKh.R. TulyaganovArifov Institute of Electronica, Academgorodok, 700143 Tashkent U.S.S.RZ.A. IskanderovaArifov Institute of Electronica, Academgorodok, 700143 Tashkent U.S.S.RT.D. RadjabovArifov Institute of Electronica, Academgorodok, 700143 Tashkent U.S.S.RM.A. AlimovaArifov Institute of Electronica, Academgorodok, 700143 Tashkent U.S.S.RL.P. KovarskiArifov Institute of Electronica, Academgorodok, 700143 Tashkent U.S.S.RV.A. KrakhmalyovArifov Institute of Electronica, Academgorodok, 700143 Tashkent U.S.S.R

Materials Science and Engineering Ajournal1991en

ABI

Abstract

No abstract available.

Topics

Ion-surface interactions and analysis Metal and Thin Film Mechanics Diamond and Carbon-based Materials Research

Identifiers

DOI: 10.1016/0921-5093(91)90644-3

Citations and references

Cited by 06 references

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