Article

Study of ion-bombardment-induced surface topography of silver by stereophotogrammetric method

I. M. FayazovInstitute of Nuclear Physics , Moscow, 119899, USSRV. N. SokolovFaculty of Geology, Moscow State University , Moscow, 119899, USSR

Radiation effects and defects in solidsjournal1992en

ABI

Abstract

Abstract The ion-bombardment-induced surface topography of polycrystalline silver was studied using the stereo-photogrammetric method. The samples were irradiated with 30keV argon ions at fairly high fluences (> 1017 ions/cm2). The influence of the inclination angle of the sample in the SEM on the cone shape of a SEM-picture is discussed. To analyse the irradiated surfaces covered with cones, the SEM-stereotechnique is proposed. The measurements of the sample section perpendicular to the incidence plane are also carried out.

Topics

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Diamond and Carbon-based Materials Research

Identifiers

DOI: 10.1080/10420159208220188

Citations and references

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