Article

High-energy ion implantation in polymer films

L. Ya. AlimovaArifov Institute of Electronics, Uzbek Academy of Sciences, Academgorodok, 700143 Tashkent, UzbekistanI.E. DjamaletdinovaArifov Institute of Electronics, Uzbek Academy of Sciences, Academgorodok, 700143 Tashkent, UzbekistanT.S. PugachevaTashkent Technical University, Vuzgorodok, 700000 Tashkent, UzbekistanIE IlichevaTashkent Technical University, Vuzgorodok, 700000 Tashkent, Uzbekistan

Vacuumjournal1992en

ABI

Abstract

No abstract available.

Topics

Polymer Nanocomposite Synthesis and Irradiation Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis

Identifiers

DOI: 10.1016/0042-207x(92)90112-a

Citations and references

Cited by 06 references

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