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A contribution of the formation mechanism of sputtered atom excited states of rare-earth metals

E.K. VasiljevaArifov Institute of Electronics, Uzbek Academy of Sciences, Akademgorodok, Tashkent 700143, UzbekistanS.A. MorosovArifov Institute of Electronics, Uzbek Academy of Sciences, Akademgorodok, Tashkent 700143, Uzbekistan
Vacuumjournal1993en
ABI

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