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Article

Use of a two-wire microwave line at the boundary of the investigated zone to measure the electron density in a low-temperature plasma

A. D. ZuevA. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. PetersburgAndrey G. SmolinA. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg
Technical Physics Lettersjournal1997en
ABI

Abstract

A new method based on a two-wire line has been developed for noncontact diagnostics of a low-temperature plasma and its fluxes in channels with complex profiles. This method provides good spatial and time resolution.

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