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Works cited by this work

4 works

Work: Regular relief on a silicon surface as a structural defect getter

  1. Structural Quality of Directly Bonded Silicon Wafers with Regularly Grooved Interfaces

    E. D. Kim, S. C. Kim, J. M. Park +4

    Article19972 citations
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  2. Current and capacitance transient responses of MOS capacitor. I. General theory and applications to initially depleted surface without surface states

    C. T. Sah, H.-S. Fu

    Article19722 citations
    ABI

  3. Untitled

    Other1 citations
    ABI

  4. Untitled

    Other1 citations
    ABI