Computer simulation of ion implantation at grazing ion-surface interactions
A.A. DzhurakhalovF.F. UmarovInstitute of Applied Physics, National University of Uzbekistan, Tashkent, Uzbekistan
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)conference2002en
ABI
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