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Diffusion of europium in silicon

D. É. NazyrovUlugbek National University of Uzbekistan, Tashkent, 700174, Uzbekistan
Semiconductorsjournal2003en
ABI

Abstract

The diffusion of europium in silicon has been studied for the first time in the temperature range 1100–1250°C by the direct radioactive-tracer method. The diffusion parameters of europium impurity in silicon have been established.

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