Article

Layer-by-Layer Sputtering and Ultrathin Ion Implantation by Low-Energy Grazing Ion Bombardment

Abdurauf A. DzhurakhalovTheoretical Dept., Arifov Institute of Electronics, F.Khodjaev Street, 33, Tashkent, 700125, UzbekistanS.E. RahmatovTheoretical Dept., Arifov Institute of Electronics, F.Khodjaev Street, 33, Tashkent, 700125, UzbekistanN.A. TeshabaevaTheoretical Dept., Arifov Institute of Electronics, F.Khodjaev Street, 33, Tashkent, 700125, UzbekistanMaqsud YusupovTheoretical Dept., Arifov Institute of Electronics, F.Khodjaev Street, 33, Tashkent, 700125, Uzbekistan

MRS Proceedingsjournal2005en

ABI

Abstract

No abstract available.

Topics

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Semiconductor materials and devices

Identifiers

DOI: 10.1557/proc-0908-oo14-08

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