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Magnetron sputtering of a vanadium-diboride target in Ar+N2 gaseous mixtures

А. І. БажинDonetsk National University, Donetsk, UkraineAlexander GoncharovDonbass State Machinery Academy, Kramatorsk, Donetsk reg. 84313, UkraineV. V. PetukhovDonbass State Machinery Academy, Kramatorsk, Donetsk reg. 84313, UkraineT.D. RadjabovUzbek Academy of Science, UsbekistanВ. А. СтупакDonetsk National University, Donetsk, UkraineV. A. KonovalovDonbass State Machinery Academy, Kramatorsk, Donetsk reg. 84313, Ukraine
Vacuumjournal2006en
ABI

Abstract

No abstract available.

Topics

Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research

Identifiers

DOI
10.1016/j.vacuum.2005.12.003

Citations and references

Cited by 09 references
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