<title>Ion channeling and implantation into Cu (100) and Cu<formula><inf><roman>3</roman></inf></formula>Au (100)</title>
Abstract
Dynamics of the trajectory change has been simulated in order to study the energy losses of channeled ions as well as the angular and energy distributions of ions transmitted through a thin crystal as the functions of single crystal composition, of impact parameters with respect to the channel center and of initial energy. It has been established that the inelastic interactions define the main energy loss for a paraxial part of channeled beam. The elastic energy losses for channeled ions are larger in a Cu<sub>3</sub>Au (100) crystal than in a Cu (100). Because of the fact that Au atoms are heavier than Cu atoms, in a case of Cu<sub>3</sub>Au (100) the ion dechanneling rate is greater and the channeling range is smaller in comparison with the similar characteristics for Cu (100).