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Application of ion implantation for obtaining the nanofilms of metal silicides

Б. Е. УмирзаковД. А. ТашмухамедоваB.A. KadyrovTashkent state tech. univ., Tashkent (Uzbekistan)
Uzbekiston Fizika Zhurnalijournal2008en
ABI

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Topics

Semiconductor materials and interfacesIon-surface interactions and analysisAdvanced Materials Characterization Techniques

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Cited by 00 references
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