Article

A SHF-SEM method of induced current

A. N. BuzyninRussian Academy of SciencesA. E. Lük’yanovMoscow State UniversityF. A. Luk’yanovSkobeltsyn Institute of Nuclear PhysicsЭ. И. РауMoscow State University

Bulletin of the Russian Academy of Sciences Physicsjournal2011en

ABI

Abstract

We consider features of studying semiconductor structures by SEM with an attachment for registering microwave signal variations when a sample in an SHF field is irradiated by pulsing electronic probe.

Topics

Advanced Energy Technologies and Civil Engineering Innovations Semiconductor materials and interfaces Ion-surface interactions and analysis

Identifiers

DOI: 10.3103/s1062873811090073

Citations and references

Cited by 04 references

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