Erbium ion implantation into diamond – measurement and modelling of the crystal structure
Jakub Cajzl166 28 PraguePavla Nekvindová166 28 PragueAnna Macková250 68 ŘežPetr Malinský250 68 ŘežDavid Sedmidubský166 28 PragueMichal Hušák166 28 PragueZ. Remeš162 00 PragueM. Varga162 00 PragueAlexander Kromka162 00 PragueRoman Böttger01328 DresdenJ. Oswald162 00 Prague
ABI
Abstract
. The experimental results revealed a high degree of diamond structural damage after the ion implantation process reaching up to 69% of disordered atoms in the samples. The prepared Er-doped diamond samples annealed at the temperatures of 400, 600 and 800 °C in a vacuum revealed clear luminescence, where the 〈110〉 cut sample has approximately 6-7 times higher luminescence intensity than the 〈001〉 cut sample with the same ion implantation fluence. The reported results are the first demonstration of the Er luminescence in the single crystal diamond structure for the near-infrared spectral region.
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