Article

Low Energy Ar<sup>+</sup> Ions Scattering from SiO<sub>2 </sub>(001)&lt;Ι10&gt; Surface under Grazing Incidence

Atabek S. AshirovUrgench State UniversityUchkun KutlievUrgench State UniversitySoyibjon XakimovAndijan Machine Building InstituteSh. K. Ismailov

Materials science forumbook series2022en

ABI

Abstract

This article presents the results of computer modeling of small-angle scattering of Ar+ ions from the surface of the SiO 2 thin film under bombardment by low-energy. The study of the trajectory of the scattered ions showed that the trajectories with two focuses are observed not only near the center of the semichannel but also nearby the surface of the atomic chain. An increase in the value of the initial energy of incident particles leads to a narrowing of the trajectory of the scattered ions, which leads to the appearance of low-intensity peaks in the energy spectrum of the scattered ions.

Topics

Ion-surface interactions and analysis Nuclear Physics and Applications Electron and X-Ray Spectroscopy Techniques

Identifiers

DOI: 10.4028/www.scientific.net/msf.1049.152

Citations and references

Cited by 1 7 references

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Low Energy Ar&lt;sup&gt;+&lt;/sup&gt; Ions Scattering from SiO&lt;sub&gt;2 &lt;/sub&gt;(001)&amp;lt;Ι10&amp;gt; Surface under Grazing Incidence

Abstract

Topics

Identifiers

Citations and references

Low Energy Ar<sup>+</sup> Ions Scattering from SiO<sub>2 </sub>(001)<Ι10> Surface under Grazing Incidence