A Program for Calculating the Projective Range and Straggling of Ions in a Solidusing the Approximation of V.V. Yudin
Abstract
Ion implantation is the basis of many technological processes in electronics and microelectronics. The main quantities characterizing the penetration of ions into a solid are as follows; the length of the path of the ion until it stops completely, the average value of the projection of the total path on the direction of motion R̅p, and the average normal deviation of the projection of the path ΔR̅p. To calculate these values, computer programs SRIM, TRIM, and DYNE have been created, which require installation on a personal computer and occupy a large amount of hard disk space, which is not always justified in engineering practice. This paper describes an algorithm for a simple, installation-free program for calculating R̅p and ΔR̅p. The program algorithm is based on the Lindhard-Scharff-Schiott theory.