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UV laser formation of complex topologies for sensitive elements of navigation sensors based on surface acoustic waves

Daniil SafronovSamarkand State University, Faculty of Physics, 140104, University blv. 15, Samarkand city, Samarkand region, UzbekistanAlexander KukaevSt.-Petersburg Electrotechnical University, Prof. Popova str., 5, lit. F, 197022 St.-Petersburg, RussiaG.M. ShubinSt.-Petersburg Electrotechnical University, Prof. Popova str., 5, lit. F, 197022 St.-Petersburg, RussiaAlina V. GorelayaSt.-Petersburg Electrotechnical University, Prof. Popova str., 5, lit. F, 197022 St.-Petersburg, RussiaVladimir Y. VenediktovSt.-Petersburg Electrotechnical University, Prof. Popova str., 5, lit. F, 197022 St.-Petersburg, Russia
Optics & Laser Technologyjournal2023en
ABI

Abstract

No abstract available.

Topics

Acoustic Wave Resonator TechnologiesAdvanced MEMS and NEMS TechnologiesMechanical and Optical Resonators

Identifiers

DOI
10.1016/j.optlastec.2023.110000

Citations and references

Cited by 023 references
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