Article

FTIR-АНАЛИЗ ТОНКИХ ПЛЕНОК КРЕМНИЯ И ОКСИДА КРЕМНИЯ

Muradulla NormuradovDoctor of Physical and Mathematical Sciences, Professor, Karshi State UniversityK.T. DovranovKarshi State UniversitKh.T. DavranovKarshi State UniversityMuzaffar DavlatovKarshi State University

2023ru

ABI

Abstract

FT-IR spectrometers are used to solve various problems of modern analytics. Designed for qualitative analysis, checking the refractive index of thin films, the thickness of thin films. We studied the mid-infrared transmission and absorption spectra, refractive index, layer thickness, standard deviation, incident angle, average interference fringes, and the coupling between silicon and oxygen of thin films obtained by the ion-plasma method.

Topics

Photonic and Optical Devices Optical Coatings and Gratings Semiconductor Lasers and Optical Devices

Identifiers

DOI: 10.56292/sjfsu/vol29_iss4/a68

Citations and references

Cited by 05 references

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