Works cited by this work

43 works

Work: Collisionless magnetized rf sheath resonance heating in dual-frequency capacitively coupled plasmas

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4. Electrostatic modelling of dual frequency rf plasma discharges

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8. Observation of nonlinear sheath oscillations in symmetric capacitive discharges at low pressures

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9. Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: experiments and particle-in-cell simulation

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