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Enhancing AZO thin films for optoelectronics: the impact of substrate temperature and vacuum annealing

Hyeongsik ParkAI-Superconvergence KIURI Translational Research Center, Ajou University School of Medicine, Suwon, 16499, KoreaJaehyun ChoCollege of Information and Communication Engineering, Sungkyunkwan University, Suwon, 16419, KoreaJunsin YiCollege of Information and Communication Engineering, Sungkyunkwan University, Suwon, 16419, Korea
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