← Back to work
Works cited by this work
28 works
Work: Influence of collision processes in the sheath on ion energy distribution functions in radio frequency discharges
The 2022 Plasma Roadmap: low temperature plasma science and technology
Igor Adamovich, Sumit Agarwal, Eduardo Ahedo +38
Article20223 citationsABIElectrostatic modelling of dual frequency rf plasma discharges
P C Boyle, A. R. Ellingboe, M. M. Turner
Article20042 citationsABICollisionless Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Plasmas
Yong-Xin Liu, Quan‐Zhi Zhang, Wei Jiang +4
Article20112 citationsABIDual excitation reactive ion etcher for low energy plasma processing
H. Gotô, Hans-Dirk Löwe, Tadahiro Ohmi
Article19922 citationsABI