Atomic Force Microscope
G. BinnigEdward L. Ginzton Laboratory, Stanford University, Stanford, California 94305C. F. QuateEdward L. Ginzton Laboratory, Stanford University, Stanford, California 94305Ch. GerberEdward L. Ginzton Laboratory, Stanford University, Stanford, California 94305
1986en
ABI
Abstract
The scanning tunneling microscope is proposed as a method to measure forces as small as ${10}^{\ensuremath{-}18}$ N. As one application for this concept, we introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale. The atomic force microscope is a combination of the principles of the scanning tunneling microscope and the stylus profilometer. It incorporates a probe that does not damage the surface. Our preliminary results in air demonstrate a lateral resolution of 30 \AA{}A and a vertical resolution less than 1 \AA{}.
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Cited by 30 references