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Work: Comparison of electron irradiation on the formation of surface defects in situ and post thin-film LiF/Si(111) deposition

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  5. Controlling the Low-Temperature Ionic Purification of a Silicon Surface by Electron Spectroscopy

    U. B. Sharopov, Kulwinder Kaur, М. К. Курбанов +3

    PreprintSemiconductor materials and devicesResearch Square20211 citations
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