Effect of atmospheric-pressure plasma jet on polycrystalline diamond micro-milling of silicon carbide
Kazutoshi KatahiraMaterials Fabrication Laboratory, RIKEN, 2-1 Hirosawa Wako-shi, Saitama 351-0198, JapanHitoshi OhmoriMaterials Fabrication Laboratory, RIKEN, 2-1 Hirosawa Wako-shi, Saitama 351-0198, JapanShogo TakesueDepartment of Mechanical Engineering, Keio University, 3-14-1 Hiyoshi Kohoku-ku, Yokohama, Kanagawa 223-8522, JapanJun KomotoriDepartment of Mechanical Engineering, Keio University, 3-14-1 Hiyoshi Kohoku-ku, Yokohama, Kanagawa 223-8522, JapanKazuo YamazakiDepartment of Mechanical & Aerospace Engineering, University of California at Davis, Davis, CA 95616, USA
2015en
ABI
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Cited by 20 references