Depth distribution of Cu, Ag and Au ions implanted at low energy into insulators
А. Л. СтепановLaboratory of Radiation Physics, Kazan Physical-Technical Institute, Russian Academy of Science, Sibirsky Trakt 10/7, Kazan 420029, Russian FederationВ. А. ЖихаревLaboratory of Radiation Physics, Kazan Physical-Technical Institute, Russian Academy of Science, Sibirsky Trakt 10/7, Kazan 420029, Russian FederationD.E. HoleSchool of Engineering, Pevensey Building, University of Sussex, Falmer, Brighton, BN1 9QH, UKP. D. TownsendSchool of Engineering, Pevensey Building, University of Sussex, Falmer, Brighton, BN1 9QH, UKИ. Б. ХайбуллинLaboratory of Radiation Physics, Kazan Physical-Technical Institute, Russian Academy of Science, Sibirsky Trakt 10/7, Kazan 420029, Russian Federation
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Cited by 40 references