SiNx thickness dependent morphology and mechanical properties of CrAlN/SiNx nanomultilayers
Wei LiSchool of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai, 200093, ChinaPing LiuSchool of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai, 200093, ChinaYongsheng ZhaoSchool of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai, 200093, ChinaKe ZhangNational Engineering Research Center for Nanotechnology, Shanghai, 200241, ChinaFengcang MaSchool of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai, 200093, ChinaXinkuan LiuSchool of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai, 200093, ChinaXiaohong ChenSchool of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai, 200093, ChinaDaihua HeSchool of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai, 200093, China
2013en
ABI
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Cited by 20 references