Article

Dielectric function representation by B‐splines

Blaine JohsJ.A. Woollam Co., Inc., 645 M St. #102, Lincoln, NE 68508, USAJeffrey S. HaleJ.A. Woollam Co., Inc., 645 M St. #102, Lincoln, NE 68508, USA

2008en

ABI

Abstract

Abstract Accurate dielectric function values are essential for spectroscopic ellipsometry data analysis by traditional optical model‐based analysis techniques. In this paper, we show that B‐spline basis functions offer many advantages for param‐ eterizing dielectric functions. A Kramers–Kronig consistent B‐spline formulation, based on the standard B‐spline recursion relation, is derived. B‐spline representations of typical semiconductor and metal dielectric functions are also presented. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

Identifiers

DOI: 10.1002/pssa.200777754

Citations and references

Cited by 20 references

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