Measurement of Sheet Resistivities with the Four-Point Probe

Abstract

Correction factors are evaluated for the measurement of sheet resistirities on two-dimensional rectangular and circular samples with the four-point probe. Diffused surface layers can be treated as two-dimensional structures, but the factors are also useful in obtaining body resistivities on thin samples.

Identifiers

DOI

10.1002/j.1538-7305.1958.tb03883.x

Citations and references