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Article

Electronic structure of silicon dioxide (a review)

S. S. NekrashevichSIberian Branch of Russian Academy of SciencesV. A. GritsenkoSIberian Branch of Russian Academy of Sciences
2014en
ABI

Abstract

Silicon dioxide amorphous films are the key insulators in silicon integrated circuits. The physical properties of silicon dioxide are determined by the electronic structure of this material. The currently available information on the electronic structure of silicon dioxide has been systematized.

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Citations and references

Cited by 30 references