Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films
Sigelinde Van Steenberge#N#Research Group DRAFT, Department of Solid State Sciences, Ghent University, Krijgslaan 281 (S1), 9000 Ghent, BelgiumWouter Leroy#N#Research Group DRAFT, Department of Solid State Sciences, Ghent University, Krijgslaan 281 (S1), 9000 Ghent, BelgiumDiederik Depla#N#Research Group DRAFT, Department of Solid State Sciences, Ghent University, Krijgslaan 281 (S1), 9000 Ghent, Belgium
2013en
ABI
Abstract
No abstract available.
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Cited by 20 references