Stabilization of Cubic AlN in Epitaxial AlN/TiN Superlattices
Anita MadanDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois, 60208I. W. KimDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois, 60208Shangcong ChengDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois, 60208P. YasharDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois, 60208Vinayak P. DravidDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois, 60208Scott A. BarnettDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois, 60208
1997en
ABI
Abstract
The high-pressure rocksalt structure of AlN was stabilized in epitaxial AlN/TiN(001) superlattices with AlN layer thickness $\ensuremath{\le}2.0\mathrm{nm}$. The AlN layers were shown to be pure rocksalt-structure AlN, with a stress-free lattice parameter of $0.408\ifmmode\pm\else\textpm\fi{}0.002\mathrm{nm}$, using x-ray diffraction, transmission electron microscopy, and electron energy loss spectroscopy. The stable hexagonal phase was observed for AlN layer thickness $>2\mathrm{nm}$. The rocksalt structure formed at small layer thicknesses since it provided lower AlN/TiN interfacial energy than the hexagonal or zinc-blende structures.
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