Article

Investigation of Angular Spectrum of Scattered Inert Gas Ions from the InGaP (001) Surface

М. K. KаrimovUrgench State UniversityUchkun KutlievUrgench State UniversityS.B. BobojonovaUrgench State UniversityKamola OtabaevaUrgench State University

Physics and Chemistry of Solid Statejournal2021en

ABI

Abstract

It has been shown that this method is quite suitable for surface studies and diagnostics of many component materials. The values of the azimuthal angle of distribution of Ne, Ar and Xe ions scattered from InGaP (001) <110> are obtained. The relationship between the spatial variables of the scattered beam (mainly azimuthal angular spectra) and the type of ions has been established. The correlation between focusing properties of surface semichannel with a type of bombardment ion at the different angle of incidence has been shown.

Topics

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Electron and X-Ray Spectroscopy Techniques

Identifiers

DOI: 10.15330/pcss.22.4.742-745

Citations and references

Cited by 100 references

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