Skip to main content
AkademIndex

Products

For developers

AkademBaseOpen API for the ecosystem
Article

Neutral and negative ion cluster emission during sputtering

M.K. AbdullaevaБ.Г. АтабаевR. Dzabbarganov
1991en
ABI

Abstract

No abstract available.

Identifiers

DOI
10.1016/0168-583x(91)95925-4

Citations and references

Cited by 50 references
Metrics — AkademScholar