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Work: Oxide film assisted dopant diffusion in silicon carbide

  1. Investigation of boron diffusion in 6H-SiC

    Yu Gao, Stanislav I. Soloviev, T. S. Sudarshan

    Article20035 citations
    ABI
  2. Selective doping of 4H–SiC by codiffusion of aluminum and boron

    Yu Gao, Stanislav I. Soloviev, T. S. Sudarshan +1

    Article20012 citations
    ABI
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    Other1 citations
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