Fabrication of well-ordered silicon nanopillars embedded in a microchannel via metal-assisted chemical etching: a route towards an opto-mechanical biosensor

Abstract

Nanofabrication methodology that integrates the creation of silicon nanopillars inside a microfluidic channel which has significant implications for the achievement of new optomechanical biosensors.

Identifiers

DOI

10.1039/c6ra15485a

Citations and references