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5 works

Work: Thermal spikes observed during the tantalum sputtering by gold cluster ions

  1. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

    Peter Sigmund

    Article196911 citations
    ABI
  2. スパッタの理論 I 非晶質のスパッタ収量と多結晶ターゲット

    Peter Sigmund

    Article19699 citations
    ABI
  3. Sputtering from elastic-collision spikes in heavy-ion-bombarded metals

    Peter Sigmund, Claus D. Claussen

    Article19818 citations
    ABI