New fabrication of high-frequency (100-MHz) ultrasound PZT film kerfless linear array [Correspondence]
Benpeng ZhuDepartment of Applied Physics, The Hong Kong Polytechnic University, Hong Kong, ChinaNgai Yui ChanDepartment of Applied Physics, The Hong Kong Polytechnic University, Hong Kong, ChinaJiyan DaiDepartment of Applied Physics, The Hong Kong Polytechnic University, Hong Kong, ChinaK. Kirk ShungDepartment of Biomedical Engineering, University of Southern California, Los Angeles, CAShinichi TakeuchiMedical Engineering Course, Toin University of Yokohama, Yokohama, JapanQifa ZhouDepartment of Biomedical Engineering, University of Southern California, Los Angeles, CA
2013en
ABI
Abstract
The paper describes the design, fabrication, and measurements of a high-frequency ultrasound kerfless linear array prepared from hydrothermal lead zirconate titanate (PZT) thick film. The 15-μm hydrothermal PZT thick film with an area of 1 × 1 cm, obtained through a self-separation process from Ti substrate, was used to fabricate a 32-element 100-MHz kerfless linear array with photolithography. The bandwidth at -6 dB without matching layer, insertion loss around center frequency, and crosstalk between adjacent elements were measured to be 39%, -30 dB, and -15 dB, respectively.
Identifiers
Citations and references
Cited by 20 references