Article

Sol-gel derived PMN-PT thick film for high frequency ultrasound transducer applications

Benpeng ZhuNIH Transducer Resource Center and Department of Biomedical Engineering, University of Southern California, Los Angeles, CA, USAQifa ZhouNIH Transducer Resource Center and Department of Biomedical Engineering, University of Southern California, Los Angeles, CA, USAK. Kirk ShungNIH Transducer Resource Center and Department of Biomedical Engineering, University of Southern California, Los Angeles, CA, USAQiang WeiChemat Technology, Inc., Northridge, CA, USAYuhong HuangChemat Technology, Inc., Northridge, CA, USA

2009en

ABI

Abstract

Piezoelectric 0.65Pb(Mg 1/3 Nb 2/3 )O 3 -0.35PbTiO 3 thick film with the thickness around 12 ¿m has been deposited on the platinum bufered Si substrate via a composite spin-coating method. The X-ray diffraction analysis and scanning electron microscopy revealed that the film was in the well-crystallized perovskite phase and crack-free. The separation of films from the substrate was achieved using a wet chemical method. The lifted-off film exhibited good dielectric and ferroelectric properties. At 1 kHz, the dielectric constant and the loss were 3326 and 0.037, respectively, while the remnant polarization was 30.0 ¿C/cm 2 . A high frequency single element acoustic transducer fabricated with this film showed a bandwidth at -6 dB of 63.6% at 110 MHz.

Identifiers

DOI: 10.1109/ultsym.2009.5441779

Citations and references

Cited by 20 references

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