Sputtering of Tantalum by Atomic and Molecular Gold Ions: Comparative Study of Yields and Kinetic Energy Distributions of Atomic and Cluster Ions
S.F. BelykhAcademy of Science of Uzbekistan, Arifov Institute of Electronic, 700143, Tashkent, UzbekistanУ. Х. РасулевAcademy of Science of Uzbekistan, Arifov Institute of Electronic, 700143, Tashkent, UzbekistanA.V. SamartsevAcademy of Science of Uzbekistan, Arifov Institute of Electronic, 700143, Tashkent, UzbekistanС. В. ВерхотуровAcademy of Science of Uzbekistan, Arifov Institute of Electronic, 700143, Tashkent, UzbekistanI. V. VeryovkinAcademy of Science of Uzbekistan, Arifov Institute of Electronic, 700143, Tashkent, Uzbekistan
1998en
ABI
Abstract
No abstract available.