Effect of ion irradiation on the depth profiles of microdefects in silicon
Е. С. ДемидовLobachevski State University, pr. Gagarina 23, 603600, Nizhni Novgorod, RussiaN. D. LatyshevaLobachevski State University, pr. Gagarina 23, 603600, Nizhni Novgorod, RussiaV. A. PerevoshchikovLobachevski State University, pr. Gagarina 23, 603600, Nizhni Novgorod, RussiaА. В. СкуповLobachevski State University, pr. Gagarina 23, 603600, Nizhni Novgorod, RussiaV. D. SkupovLobachevski State University, pr. Gagarina 23, 603600, Nizhni Novgorod, Russia
2000en
ABI
Abstract
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Cited by 20 references