Development of the modern vacuum coating technologies
В. А. ВасинБ. Л. КритMoscow Aviation Institute (National Research University), ul. Polbina 45, Moscow, 109383, RussiaО. В. СомовPerm National Research Polytechnic University, Komsomol’skii pr. 29, Perm, Perm krai, 614990, RussiaV. A. SorokinAO Kartukov Mechanical-Engineering Design Bureau Iskra, Leningradskii pr. 35, Moscow, 125284, RussiaV. P. FrantskevichAO Kartukov Mechanical-Engineering Design Bureau Iskra, Leningradskii pr. 35, Moscow, 125284, RussiaА. В. ЭпельфельдMoscow Aviation Institute (National Research University), ul. Polbina 45, Moscow, 109383, Russia
2016en
ABI
Abstract
Modern physical vapor deposition and chemical vapor deposition technologies intended for the protection of surfaces of products, in particular, the pyrolytic deposition of chromium carbide coatings using organometallic compounds as precursors, are discussed.
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Cited by 30 references