Article

Kinetic energy distributions of sputtered indium atoms and clusters

Z. MaMaterials Science, Chemical Technology, and Chemistry Divisions, Argonne National Laboratory, Argonne, IL 60439, USAW. F. CalawayMaterials Science, Chemical Technology, and Chemistry Divisions, Argonne National Laboratory, Argonne, IL 60439, USAMichael J. PellinMaterials Science, Chemical Technology, and Chemistry Divisions, Argonne National Laboratory, Argonne, IL 60439, USAEllak I. von Nagy‐FelsobukiMaterials Science, Chemical Technology, and Chemistry Divisions, Argonne National Laboratory, Argonne, IL 60439, USA

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Abstract

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Identifiers

DOI: 10.1016/0168-583x(94)95354-6

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Cited by 20 references

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