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Investigation of change of the composition and structure of the CaF2/Si films surface at the low-energy bombardment
Б. Е. Умирзаков, Д. А. Ташмухамедова, М. К. Рузибаева +2
ArticleSilicon Nanostructures and PhotoluminescenceNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms201413 citationsABI