Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses
Toshiaki KondoCore Research for Evolutional Science and Technology (CREST), Japan Science and Technology Corporation (JST)Shigeki MatsuoCore Research for Evolutional Science and Technology (CREST), Japan Science and Technology Corporation (JST)Saulius JuodkazisCore Research for Evolutional Science and Technology (CREST), Japan Science and Technology Corporation (JST)Vygantas MizeikisCore Research for Evolutional Science and Technology (CREST), Japan Science and Technology Corporation (JST)Hiroaki MisawaCore Research for Evolutional Science and Technology (CREST), Japan Science and Technology Corporation (JST)
2003en
ABI
Abstract
Femtosecond laser pulses are useful for laser microfabrication through multiphoton absorption. However, it is difficult to create interference of femtosecond pulses for the fabrication of periodic structures. In this letter, we report the fabrication of two-dimensional periodic structures by means of multibeam interference of femtosecond pulses. Scanning electron microscopy revealed a rod structure arranged into a square lattice. The possibility of controlling the period of the lattice, rod thickness, and rod shape were demonstrated.
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Cited by 20 references