The effect of ion mass and target temperature on the energy distribution of sputtered atoms
Shoaib AhmadSchool of Mathematical and Physical Sciences, University of Sussex , Brighton, BN1 9QH, EnglandB. W. FarmerySchool of Mathematical and Physical Sciences, University of Sussex , Brighton, BN1 9QH, EnglandM. W. ThompsonSchool of Mathematical and Physical Sciences, University of Sussex , Brighton, BN1 9QH, England
1980en
ABI
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Cited by 20 references