Article

Boron diffusion into 6H-SiC through graphite mask

Stanislav I. SolovievDepartment of Electrical Engineering, University of South Carolina, 29208, Columbia, SCYing GaoDepartment of Electrical Engineering, University of South Carolina, 29208, Columbia, SCX. WangDepartment of Electrical Engineering, University of South Carolina, 29208, Columbia, SCT. S. SudarshanDepartment of Electrical Engineering, University of South Carolina, 29208, Columbia, SC

2001en

ABI

Abstract

No abstract available.

Identifiers

DOI: 10.1007/s11664-001-0020-4

Citations and references

Cited by 20 references

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