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Works citing this work
1 works
Computer simulation of SiC and B4C sputtering by Ar+ and He+ ions bombardment
T.S. Pugacheva
,
F.G. Jurabekova
,
Y. Miyagawa
+1
Article
Ion-surface interactions and analysis
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
1997
3 citations
ABI
ABI:AkademIndex/openalex/2026.other.488710